8/10/2012	9:32:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2012	9:32:25 AM	Recipe started at 9:32 AM
8/10/2012	9:32:25 AM	Helium valve closed
8/10/2012	9:32:25 AM	H2 valve closed
8/10/2012	9:32:25 AM	BCl3 valve closed
8/10/2012	9:32:26 AM	PH3 valve closed
8/10/2012	9:32:26 AM	SiCl4 pre valve closed
8/10/2012	9:32:26 AM	SiCl4 post valve closed
8/10/2012	9:32:26 AM	Main Vac valve closed
8/10/2012	9:32:26 AM	Bypass valve closed
8/10/2012	9:32:26 AM	Bubbler valve closed
8/10/2012	9:32:26 AM	Helium MFC set to  0.000000
8/10/2012	9:32:26 AM	H2 MFC set to  0.000000
8/10/2012	9:32:26 AM	BCl3 MFC set to  0.000000
8/10/2012	9:32:26 AM	PH3 MFC set to  0.000000
8/10/2012	9:32:26 AM	SiCl4 MFC set to  0.000000
8/10/2012	9:32:26 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	9:32:26 AM	Tube furnace set to 0
8/10/2012	9:32:29 AM	H2 valve closed
8/10/2012	9:32:29 AM	BCl3 valve closed
8/10/2012	9:32:29 AM	PH3 valve closed
8/10/2012	9:32:29 AM	SiCl4 pre valve closed
8/10/2012	9:32:29 AM	SiCl4 post valve closed
8/10/2012	9:32:29 AM	Main Vac valve closed
8/10/2012	9:32:29 AM	Bypass valve closed
8/10/2012	9:32:29 AM	Bubbler valve closed
8/10/2012	9:32:29 AM	Helium valve opened
8/10/2012	9:32:29 AM	Helium MFC set to  500.000000
8/10/2012	9:32:29 AM	H2 MFC set to  0.000000
8/10/2012	9:32:29 AM	BCl3 MFC set to  0.000000
8/10/2012	9:32:29 AM	PH3 MFC set to  0.000000
8/10/2012	9:32:29 AM	SiCl4 MFC set to  0.000000
8/10/2012	9:32:29 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	9:32:29 AM	Tube furnace set to 0
8/10/2012	9:33:41 AM	Helium valve closed
8/10/2012	9:33:41 AM	H2 valve closed
8/10/2012	9:33:41 AM	BCl3 valve closed
8/10/2012	9:33:41 AM	PH3 valve closed
8/10/2012	9:33:41 AM	SiCl4 pre valve closed
8/10/2012	9:33:41 AM	SiCl4 post valve closed
8/10/2012	9:33:41 AM	Main Vac valve closed
8/10/2012	9:33:41 AM	Bypass valve closed
8/10/2012	9:33:41 AM	Bubbler valve closed
8/10/2012	9:33:41 AM	Helium MFC set to  0.000000
8/10/2012	9:33:41 AM	H2 MFC set to  0.000000
8/10/2012	9:33:41 AM	BCl3 MFC set to  0.000000
8/10/2012	9:33:41 AM	PH3 MFC set to  0.000000
8/10/2012	9:33:41 AM	SiCl4 MFC set to  0.000000
8/10/2012	9:33:41 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	9:33:41 AM	Tube furnace set to 0
8/10/2012	9:33:42 AM	Run finished at 9:33 AM
8/10/2012	9:33:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2012	9:46:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/10/2012	9:46:20 AM	Recipe started at 9:46 AM
8/10/2012	9:46:20 AM	Helium valve closed
8/10/2012	9:46:20 AM	H2 valve closed
8/10/2012	9:46:20 AM	BCl3 valve closed
8/10/2012	9:46:20 AM	PH3 valve closed
8/10/2012	9:46:20 AM	SiCl4 pre valve closed
8/10/2012	9:46:20 AM	SiCl4 post valve closed
8/10/2012	9:46:20 AM	Main Vac valve closed
8/10/2012	9:46:20 AM	Bubbler valve closed
8/10/2012	9:46:20 AM	Bypass valve opened
8/10/2012	9:46:20 AM	Helium MFC set to  0.000000
8/10/2012	9:46:20 AM	H2 MFC set to  0.000000
8/10/2012	9:46:20 AM	BCl3 MFC set to  0.000000
8/10/2012	9:46:20 AM	PH3 MFC set to  0.000000
8/10/2012	9:46:20 AM	SiCl4 MFC set to  0.000000
8/10/2012	9:46:20 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	9:46:20 AM	Tube furnace set to 0
8/10/2012	9:47:49 AM	Helium valve closed
8/10/2012	9:47:49 AM	H2 valve closed
8/10/2012	9:47:49 AM	BCl3 valve closed
8/10/2012	9:47:49 AM	PH3 valve closed
8/10/2012	9:47:49 AM	SiCl4 pre valve closed
8/10/2012	9:47:49 AM	SiCl4 post valve closed
8/10/2012	9:47:49 AM	Main Vac valve closed
8/10/2012	9:47:49 AM	Bubbler valve closed
8/10/2012	9:47:49 AM	Bypass valve opened
8/10/2012	9:47:49 AM	Helium MFC set to  0.000000
8/10/2012	9:47:49 AM	H2 MFC set to  0.000000
8/10/2012	9:47:49 AM	BCl3 MFC set to  0.000000
8/10/2012	9:47:49 AM	PH3 MFC set to  0.000000
8/10/2012	9:47:49 AM	SiCl4 MFC set to  0.000000
8/10/2012	9:47:49 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	9:47:50 AM	Tube furnace set to 0
8/10/2012	9:48:50 AM	Helium valve closed
8/10/2012	9:48:50 AM	H2 valve closed
8/10/2012	9:48:50 AM	BCl3 valve closed
8/10/2012	9:48:50 AM	PH3 valve closed
8/10/2012	9:48:50 AM	SiCl4 pre valve closed
8/10/2012	9:48:50 AM	SiCl4 post valve closed
8/10/2012	9:48:50 AM	Bypass valve closed
8/10/2012	9:48:50 AM	Bubbler valve closed
8/10/2012	9:48:50 AM	Main Vac valve opened
8/10/2012	9:48:50 AM	Helium MFC set to  0.000000
8/10/2012	9:48:50 AM	H2 MFC set to  0.000000
8/10/2012	9:48:50 AM	BCl3 MFC set to  0.000000
8/10/2012	9:48:50 AM	PH3 MFC set to  0.000000
8/10/2012	9:48:50 AM	SiCl4 MFC set to  0.000000
8/10/2012	9:48:50 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	9:48:50 AM	Tube furnace set to 0
8/10/2012	9:48:51 AM	Run finished at 9:48 AM
8/10/2012	9:48:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/10/2012	11:29:31 AM	Recipe started at 11:29 AM
8/10/2012	11:29:31 AM	Helium valve closed
8/10/2012	11:29:31 AM	H2 valve closed
8/10/2012	11:29:31 AM	BCl3 valve closed
8/10/2012	11:29:31 AM	PH3 valve closed
8/10/2012	11:29:31 AM	SiCl4 pre valve closed
8/10/2012	11:29:31 AM	SiCl4 post valve closed
8/10/2012	11:29:31 AM	Bypass valve closed
8/10/2012	11:29:31 AM	Bubbler valve closed
8/10/2012	11:29:31 AM	Main Vac valve opened
8/10/2012	11:29:31 AM	Helium MFC set to  0.000000
8/10/2012	11:29:31 AM	H2 MFC set to  0.000000
8/10/2012	11:29:31 AM	BCl3 MFC set to  0.000000
8/10/2012	11:29:31 AM	PH3 MFC set to  0.000000
8/10/2012	11:29:31 AM	SiCl4 MFC set to  0.000000
8/10/2012	11:29:31 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	11:29:32 AM	Tube furnace set to 0
8/10/2012	11:29:35 AM	Helium valve closed
8/10/2012	11:29:35 AM	H2 valve closed
8/10/2012	11:29:35 AM	BCl3 valve closed
8/10/2012	11:29:35 AM	PH3 valve closed
8/10/2012	11:29:35 AM	SiCl4 pre valve closed
8/10/2012	11:29:35 AM	SiCl4 post valve closed
8/10/2012	11:29:35 AM	Main Vac valve closed
8/10/2012	11:29:35 AM	Bypass valve closed
8/10/2012	11:29:35 AM	Bubbler valve closed
8/10/2012	11:29:35 AM	Helium MFC set to  0.000000
8/10/2012	11:29:35 AM	H2 MFC set to  0.000000
8/10/2012	11:29:35 AM	BCl3 MFC set to  0.000000
8/10/2012	11:29:35 AM	PH3 MFC set to  0.000000
8/10/2012	11:29:35 AM	SiCl4 MFC set to  0.000000
8/10/2012	11:29:35 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	11:29:35 AM	Tube furnace set to 0
8/10/2012	11:29:38 AM	Helium valve closed
8/10/2012	11:29:38 AM	BCl3 valve closed
8/10/2012	11:29:38 AM	PH3 valve closed
8/10/2012	11:29:38 AM	SiCl4 pre valve closed
8/10/2012	11:29:38 AM	SiCl4 post valve closed
8/10/2012	11:29:38 AM	Main Vac valve closed
8/10/2012	11:29:38 AM	Bypass valve closed
8/10/2012	11:29:38 AM	Bubbler valve closed
8/10/2012	11:29:38 AM	H2 valve opened
8/10/2012	11:29:38 AM	Helium MFC set to  0.000000
8/10/2012	11:29:38 AM	H2 MFC set to  500.000000
8/10/2012	11:29:38 AM	BCl3 MFC set to  0.000000
8/10/2012	11:29:38 AM	PH3 MFC set to  0.000000
8/10/2012	11:29:38 AM	SiCl4 MFC set to  0.000000
8/10/2012	11:29:38 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	11:29:38 AM	Tube furnace set to 0
8/10/2012	11:30:53 AM	Helium valve closed
8/10/2012	11:30:54 AM	BCl3 valve closed
8/10/2012	11:30:54 AM	PH3 valve closed
8/10/2012	11:30:54 AM	SiCl4 pre valve closed
8/10/2012	11:30:54 AM	SiCl4 post valve closed
8/10/2012	11:30:54 AM	Main Vac valve closed
8/10/2012	11:30:54 AM	Bypass valve closed
8/10/2012	11:30:54 AM	H2 valve opened
8/10/2012	11:30:54 AM	Bubbler valve opened
8/10/2012	11:30:54 AM	Helium MFC set to  0.000000
8/10/2012	11:30:54 AM	H2 MFC set to  500.000000
8/10/2012	11:30:54 AM	BCl3 MFC set to  0.000000
8/10/2012	11:30:54 AM	PH3 MFC set to  0.000000
8/10/2012	11:30:54 AM	SiCl4 MFC set to  0.000000
8/10/2012	11:30:54 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	11:30:54 AM	Tube furnace set to 0
8/10/2012	11:30:55 AM	Helium valve closed
8/10/2012	11:30:55 AM	BCl3 valve closed
8/10/2012	11:30:55 AM	PH3 valve closed
8/10/2012	11:30:55 AM	SiCl4 pre valve closed
8/10/2012	11:30:55 AM	SiCl4 post valve closed
8/10/2012	11:30:55 AM	Main Vac valve closed
8/10/2012	11:30:55 AM	Bypass valve closed
8/10/2012	11:30:55 AM	H2 valve opened
8/10/2012	11:30:55 AM	Bubbler valve opened
8/10/2012	11:30:55 AM	Helium MFC set to  0.000000
8/10/2012	11:30:55 AM	H2 MFC set to  500.000000
8/10/2012	11:30:55 AM	BCl3 MFC set to  0.000000
8/10/2012	11:30:55 AM	PH3 MFC set to  0.000000
8/10/2012	11:30:55 AM	SiCl4 MFC set to  0.000000
8/10/2012	11:30:55 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	11:30:55 AM	Tube furnace set to 1000
8/10/2012	11:55:55 AM	Helium valve closed
8/10/2012	11:55:55 AM	PH3 valve closed
8/10/2012	11:55:55 AM	Main Vac valve closed
8/10/2012	11:55:55 AM	Bypass valve closed
8/10/2012	11:55:55 AM	H2 valve opened
8/10/2012	11:55:55 AM	BCl3 valve opened
8/10/2012	11:55:55 AM	SiCl4 pre valve opened
8/10/2012	11:55:55 AM	SiCl4 post valve opened
8/10/2012	11:55:55 AM	Bubbler valve opened
8/10/2012	11:55:55 AM	Helium MFC set to  0.000000
8/10/2012	11:55:55 AM	H2 MFC set to  430.000000
8/10/2012	11:55:55 AM	BCl3 MFC set to  20.000000
8/10/2012	11:55:55 AM	PH3 MFC set to  0.000000
8/10/2012	11:55:55 AM	SiCl4 MFC set to  50.000000
8/10/2012	11:55:55 AM	Bypass solenoid MFC set to  0.000000
8/10/2012	11:55:55 AM	Tube furnace set to 1000
8/10/2012	12:00:55 PM	Helium valve closed
8/10/2012	12:00:55 PM	PH3 valve closed
8/10/2012	12:00:55 PM	Main Vac valve closed
8/10/2012	12:00:55 PM	Bypass valve closed
8/10/2012	12:00:55 PM	H2 valve opened
8/10/2012	12:00:55 PM	BCl3 valve opened
8/10/2012	12:00:55 PM	SiCl4 pre valve opened
8/10/2012	12:00:55 PM	SiCl4 post valve opened
8/10/2012	12:00:55 PM	Bubbler valve opened
8/10/2012	12:00:55 PM	Helium MFC set to  0.000000
8/10/2012	12:00:55 PM	H2 MFC set to  450.000000
8/10/2012	12:00:55 PM	BCl3 MFC set to  1.000000
8/10/2012	12:00:55 PM	PH3 MFC set to  0.000000
8/10/2012	12:00:55 PM	SiCl4 MFC set to  50.000000
8/10/2012	12:00:55 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	12:00:55 PM	Tube furnace set to 1000
8/10/2012	12:28:25 PM	Helium valve closed
8/10/2012	12:28:25 PM	BCl3 valve closed
8/10/2012	12:28:25 PM	Main Vac valve closed
8/10/2012	12:28:25 PM	Bypass valve closed
8/10/2012	12:28:25 PM	H2 valve opened
8/10/2012	12:28:25 PM	PH3 valve opened
8/10/2012	12:28:25 PM	SiCl4 pre valve opened
8/10/2012	12:28:25 PM	SiCl4 post valve opened
8/10/2012	12:28:25 PM	Bubbler valve opened
8/10/2012	12:28:25 PM	Helium MFC set to  0.000000
8/10/2012	12:28:25 PM	H2 MFC set to  430.000000
8/10/2012	12:28:25 PM	BCl3 MFC set to  0.000000
8/10/2012	12:28:25 PM	PH3 MFC set to  20.000000
8/10/2012	12:28:25 PM	SiCl4 MFC set to  50.000000
8/10/2012	12:28:25 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	12:28:26 PM	Tube furnace set to 1000
8/10/2012	12:29:26 PM	Helium valve closed
8/10/2012	12:29:26 PM	BCl3 valve closed
8/10/2012	12:29:26 PM	Main Vac valve closed
8/10/2012	12:29:26 PM	Bypass valve closed
8/10/2012	12:29:26 PM	H2 valve opened
8/10/2012	12:29:26 PM	PH3 valve opened
8/10/2012	12:29:26 PM	SiCl4 pre valve opened
8/10/2012	12:29:26 PM	SiCl4 post valve opened
8/10/2012	12:29:26 PM	Bubbler valve opened
8/10/2012	12:29:26 PM	Helium MFC set to  0.000000
8/10/2012	12:29:26 PM	H2 MFC set to  445.000000
8/10/2012	12:29:26 PM	BCl3 MFC set to  0.000000
8/10/2012	12:29:26 PM	PH3 MFC set to  5.000000
8/10/2012	12:29:26 PM	SiCl4 MFC set to  50.000000
8/10/2012	12:29:26 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	12:29:26 PM	Tube furnace set to 1000
8/10/2012	12:29:56 PM	Helium valve closed
8/10/2012	12:29:56 PM	BCl3 valve closed
8/10/2012	12:29:56 PM	PH3 valve closed
8/10/2012	12:29:56 PM	SiCl4 pre valve closed
8/10/2012	12:29:56 PM	SiCl4 post valve closed
8/10/2012	12:29:56 PM	Main Vac valve closed
8/10/2012	12:29:56 PM	Bypass valve closed
8/10/2012	12:29:56 PM	H2 valve opened
8/10/2012	12:29:56 PM	Bubbler valve opened
8/10/2012	12:29:56 PM	Helium MFC set to  0.000000
8/10/2012	12:29:56 PM	H2 MFC set to  500.000000
8/10/2012	12:29:56 PM	BCl3 MFC set to  0.000000
8/10/2012	12:29:56 PM	PH3 MFC set to  0.000000
8/10/2012	12:29:56 PM	SiCl4 MFC set to  0.000000
8/10/2012	12:29:56 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	12:29:56 PM	Tube furnace set to 750
8/10/2012	12:44:56 PM	H2 valve closed
8/10/2012	12:44:56 PM	BCl3 valve closed
8/10/2012	12:44:56 PM	PH3 valve closed
8/10/2012	12:44:56 PM	SiCl4 pre valve closed
8/10/2012	12:44:56 PM	SiCl4 post valve closed
8/10/2012	12:44:56 PM	Main Vac valve closed
8/10/2012	12:44:56 PM	Bypass valve closed
8/10/2012	12:44:56 PM	Helium valve opened
8/10/2012	12:44:56 PM	Bubbler valve opened
8/10/2012	12:44:56 PM	Helium MFC set to  500.000000
8/10/2012	12:44:56 PM	H2 MFC set to  0.000000
8/10/2012	12:44:56 PM	BCl3 MFC set to  0.000000
8/10/2012	12:44:56 PM	PH3 MFC set to  0.000000
8/10/2012	12:44:56 PM	SiCl4 MFC set to  0.000000
8/10/2012	12:44:56 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	12:44:56 PM	Tube furnace set to 0
8/10/2012	1:04:56 PM	Helium valve closed
8/10/2012	1:04:56 PM	H2 valve closed
8/10/2012	1:04:56 PM	BCl3 valve closed
8/10/2012	1:04:56 PM	PH3 valve closed
8/10/2012	1:04:56 PM	SiCl4 pre valve closed
8/10/2012	1:04:56 PM	SiCl4 post valve closed
8/10/2012	1:04:56 PM	Main Vac valve closed
8/10/2012	1:04:56 PM	Bypass valve closed
8/10/2012	1:04:56 PM	Bubbler valve closed
8/10/2012	1:04:56 PM	Helium MFC set to  0.000000
8/10/2012	1:04:56 PM	H2 MFC set to  0.000000
8/10/2012	1:04:56 PM	BCl3 MFC set to  0.000000
8/10/2012	1:04:56 PM	PH3 MFC set to  0.000000
8/10/2012	1:04:56 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:04:56 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:04:56 PM	Tube furnace set to 0
8/10/2012	1:24:56 PM	Helium valve closed
8/10/2012	1:24:56 PM	H2 valve closed
8/10/2012	1:24:56 PM	BCl3 valve closed
8/10/2012	1:24:56 PM	PH3 valve closed
8/10/2012	1:24:56 PM	SiCl4 pre valve closed
8/10/2012	1:24:56 PM	SiCl4 post valve closed
8/10/2012	1:24:56 PM	Main Vac valve closed
8/10/2012	1:24:56 PM	Bubbler valve closed
8/10/2012	1:24:56 PM	Bypass valve opened
8/10/2012	1:24:56 PM	Helium MFC set to  0.000000
8/10/2012	1:24:56 PM	H2 MFC set to  0.000000
8/10/2012	1:24:56 PM	BCl3 MFC set to  0.000000
8/10/2012	1:24:56 PM	PH3 MFC set to  0.000000
8/10/2012	1:24:56 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:24:56 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:24:57 PM	Tube furnace set to 0
8/10/2012	1:25:57 PM	Helium valve closed
8/10/2012	1:25:57 PM	H2 valve closed
8/10/2012	1:25:57 PM	BCl3 valve closed
8/10/2012	1:25:57 PM	PH3 valve closed
8/10/2012	1:25:57 PM	SiCl4 pre valve closed
8/10/2012	1:25:57 PM	SiCl4 post valve closed
8/10/2012	1:25:57 PM	Main Vac valve closed
8/10/2012	1:25:57 PM	Bubbler valve closed
8/10/2012	1:25:57 PM	Bypass valve opened
8/10/2012	1:25:57 PM	Helium MFC set to  0.000000
8/10/2012	1:25:57 PM	H2 MFC set to  0.000000
8/10/2012	1:25:57 PM	BCl3 MFC set to  0.000000
8/10/2012	1:25:57 PM	PH3 MFC set to  0.000000
8/10/2012	1:25:57 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:25:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:25:57 PM	Tube furnace set to 0
8/10/2012	1:26:57 PM	Helium valve closed
8/10/2012	1:26:57 PM	H2 valve closed
8/10/2012	1:26:57 PM	BCl3 valve closed
8/10/2012	1:26:57 PM	PH3 valve closed
8/10/2012	1:26:57 PM	SiCl4 pre valve closed
8/10/2012	1:26:57 PM	SiCl4 post valve closed
8/10/2012	1:26:57 PM	Bypass valve closed
8/10/2012	1:26:57 PM	Bubbler valve closed
8/10/2012	1:26:57 PM	Main Vac valve opened
8/10/2012	1:26:57 PM	Helium MFC set to  0.000000
8/10/2012	1:26:57 PM	H2 MFC set to  0.000000
8/10/2012	1:26:57 PM	BCl3 MFC set to  0.000000
8/10/2012	1:26:57 PM	PH3 MFC set to  0.000000
8/10/2012	1:26:57 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:26:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:26:58 PM	Tube furnace set to 0
8/10/2012	1:50:13 PM	Run finished at 1:50 PM
8/10/2012	1:54:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2012	1:54:25 PM	Recipe started at 1:54 PM
8/10/2012	1:54:25 PM	Helium valve closed
8/10/2012	1:54:25 PM	H2 valve closed
8/10/2012	1:54:25 PM	BCl3 valve closed
8/10/2012	1:54:25 PM	PH3 valve closed
8/10/2012	1:54:25 PM	SiCl4 pre valve closed
8/10/2012	1:54:25 PM	SiCl4 post valve closed
8/10/2012	1:54:25 PM	Main Vac valve closed
8/10/2012	1:54:25 PM	Bypass valve closed
8/10/2012	1:54:25 PM	Bubbler valve closed
8/10/2012	1:54:25 PM	Helium MFC set to  0.000000
8/10/2012	1:54:25 PM	H2 MFC set to  0.000000
8/10/2012	1:54:25 PM	BCl3 MFC set to  0.000000
8/10/2012	1:54:25 PM	PH3 MFC set to  0.000000
8/10/2012	1:54:25 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:54:25 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:54:25 PM	Tube furnace set to 0
8/10/2012	1:54:28 PM	H2 valve closed
8/10/2012	1:54:28 PM	BCl3 valve closed
8/10/2012	1:54:28 PM	PH3 valve closed
8/10/2012	1:54:28 PM	SiCl4 pre valve closed
8/10/2012	1:54:28 PM	SiCl4 post valve closed
8/10/2012	1:54:28 PM	Main Vac valve closed
8/10/2012	1:54:28 PM	Bypass valve closed
8/10/2012	1:54:28 PM	Bubbler valve closed
8/10/2012	1:54:28 PM	Helium valve opened
8/10/2012	1:54:28 PM	Helium MFC set to  500.000000
8/10/2012	1:54:28 PM	H2 MFC set to  0.000000
8/10/2012	1:54:28 PM	BCl3 MFC set to  0.000000
8/10/2012	1:54:28 PM	PH3 MFC set to  0.000000
8/10/2012	1:54:28 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:54:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:54:28 PM	Tube furnace set to 0
8/10/2012	1:55:37 PM	Helium valve closed
8/10/2012	1:55:37 PM	H2 valve closed
8/10/2012	1:55:37 PM	BCl3 valve closed
8/10/2012	1:55:37 PM	PH3 valve closed
8/10/2012	1:55:37 PM	SiCl4 pre valve closed
8/10/2012	1:55:37 PM	SiCl4 post valve closed
8/10/2012	1:55:37 PM	Main Vac valve closed
8/10/2012	1:55:37 PM	Bypass valve closed
8/10/2012	1:55:37 PM	Bubbler valve closed
8/10/2012	1:55:37 PM	Helium MFC set to  0.000000
8/10/2012	1:55:37 PM	H2 MFC set to  0.000000
8/10/2012	1:55:37 PM	BCl3 MFC set to  0.000000
8/10/2012	1:55:37 PM	PH3 MFC set to  0.000000
8/10/2012	1:55:37 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:55:37 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:55:37 PM	Tube furnace set to 0
8/10/2012	1:55:38 PM	Run finished at 1:55 PM
8/10/2012	1:55:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2012	1:58:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/10/2012	1:58:45 PM	Recipe started at 1:58 PM
8/10/2012	1:58:45 PM	Helium valve closed
8/10/2012	1:58:45 PM	H2 valve closed
8/10/2012	1:58:45 PM	BCl3 valve closed
8/10/2012	1:58:45 PM	PH3 valve closed
8/10/2012	1:58:45 PM	SiCl4 pre valve closed
8/10/2012	1:58:45 PM	SiCl4 post valve closed
8/10/2012	1:58:45 PM	Main Vac valve closed
8/10/2012	1:58:45 PM	Bubbler valve closed
8/10/2012	1:58:45 PM	Bypass valve opened
8/10/2012	1:58:45 PM	Helium MFC set to  0.000000
8/10/2012	1:58:45 PM	H2 MFC set to  0.000000
8/10/2012	1:58:45 PM	BCl3 MFC set to  0.000000
8/10/2012	1:58:45 PM	PH3 MFC set to  0.000000
8/10/2012	1:58:45 PM	SiCl4 MFC set to  0.000000
8/10/2012	1:58:45 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	1:58:45 PM	Tube furnace set to 0
8/10/2012	2:00:04 PM	Helium valve closed
8/10/2012	2:00:04 PM	H2 valve closed
8/10/2012	2:00:04 PM	BCl3 valve closed
8/10/2012	2:00:04 PM	PH3 valve closed
8/10/2012	2:00:04 PM	SiCl4 pre valve closed
8/10/2012	2:00:04 PM	SiCl4 post valve closed
8/10/2012	2:00:04 PM	Main Vac valve closed
8/10/2012	2:00:04 PM	Bubbler valve closed
8/10/2012	2:00:04 PM	Bypass valve opened
8/10/2012	2:00:04 PM	Helium MFC set to  0.000000
8/10/2012	2:00:04 PM	H2 MFC set to  0.000000
8/10/2012	2:00:04 PM	BCl3 MFC set to  0.000000
8/10/2012	2:00:04 PM	PH3 MFC set to  0.000000
8/10/2012	2:00:04 PM	SiCl4 MFC set to  0.000000
8/10/2012	2:00:04 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	2:00:04 PM	Tube furnace set to 0
8/10/2012	2:01:04 PM	Helium valve closed
8/10/2012	2:01:04 PM	H2 valve closed
8/10/2012	2:01:04 PM	BCl3 valve closed
8/10/2012	2:01:04 PM	PH3 valve closed
8/10/2012	2:01:04 PM	SiCl4 pre valve closed
8/10/2012	2:01:04 PM	SiCl4 post valve closed
8/10/2012	2:01:04 PM	Bypass valve closed
8/10/2012	2:01:04 PM	Bubbler valve closed
8/10/2012	2:01:04 PM	Main Vac valve opened
8/10/2012	2:01:04 PM	Helium MFC set to  0.000000
8/10/2012	2:01:04 PM	H2 MFC set to  0.000000
8/10/2012	2:01:04 PM	BCl3 MFC set to  0.000000
8/10/2012	2:01:04 PM	PH3 MFC set to  0.000000
8/10/2012	2:01:04 PM	SiCl4 MFC set to  0.000000
8/10/2012	2:01:04 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	2:01:04 PM	Tube furnace set to 0
8/10/2012	2:01:05 PM	Run finished at 2:01 PM
8/10/2012	2:01:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/10/2012	3:31:28 PM	Main Vac valve closed
8/10/2012	3:31:41 PM	Main Vac valve opened
8/10/2012	3:32:06 PM	Recipe started at 3:32 PM
8/10/2012	3:32:06 PM	Helium valve closed
8/10/2012	3:32:06 PM	H2 valve closed
8/10/2012	3:32:06 PM	BCl3 valve closed
8/10/2012	3:32:06 PM	PH3 valve closed
8/10/2012	3:32:06 PM	SiCl4 pre valve closed
8/10/2012	3:32:06 PM	SiCl4 post valve closed
8/10/2012	3:32:06 PM	Bypass valve closed
8/10/2012	3:32:06 PM	Bubbler valve closed
8/10/2012	3:32:06 PM	Main Vac valve opened
8/10/2012	3:32:06 PM	Helium MFC set to  0.000000
8/10/2012	3:32:06 PM	H2 MFC set to  0.000000
8/10/2012	3:32:06 PM	BCl3 MFC set to  0.000000
8/10/2012	3:32:06 PM	PH3 MFC set to  0.000000
8/10/2012	3:32:06 PM	SiCl4 MFC set to  0.000000
8/10/2012	3:32:06 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	3:32:06 PM	Tube furnace set to 0
8/10/2012	3:32:09 PM	Helium valve closed
8/10/2012	3:32:09 PM	H2 valve closed
8/10/2012	3:32:09 PM	BCl3 valve closed
8/10/2012	3:32:09 PM	PH3 valve closed
8/10/2012	3:32:09 PM	SiCl4 pre valve closed
8/10/2012	3:32:09 PM	SiCl4 post valve closed
8/10/2012	3:32:09 PM	Main Vac valve closed
8/10/2012	3:32:09 PM	Bypass valve closed
8/10/2012	3:32:09 PM	Bubbler valve closed
8/10/2012	3:32:09 PM	Helium MFC set to  0.000000
8/10/2012	3:32:09 PM	H2 MFC set to  0.000000
8/10/2012	3:32:09 PM	BCl3 MFC set to  0.000000
8/10/2012	3:32:09 PM	PH3 MFC set to  0.000000
8/10/2012	3:32:09 PM	SiCl4 MFC set to  0.000000
8/10/2012	3:32:09 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	3:32:09 PM	Tube furnace set to 0
8/10/2012	3:32:12 PM	Helium valve closed
8/10/2012	3:32:12 PM	BCl3 valve closed
8/10/2012	3:32:12 PM	PH3 valve closed
8/10/2012	3:32:12 PM	SiCl4 pre valve closed
8/10/2012	3:32:12 PM	SiCl4 post valve closed
8/10/2012	3:32:12 PM	Main Vac valve closed
8/10/2012	3:32:12 PM	Bypass valve closed
8/10/2012	3:32:12 PM	Bubbler valve closed
8/10/2012	3:32:12 PM	H2 valve opened
8/10/2012	3:32:12 PM	Helium MFC set to  0.000000
8/10/2012	3:32:12 PM	H2 MFC set to  500.000000
8/10/2012	3:32:12 PM	BCl3 MFC set to  0.000000
8/10/2012	3:32:12 PM	PH3 MFC set to  0.000000
8/10/2012	3:32:12 PM	SiCl4 MFC set to  0.000000
8/10/2012	3:32:12 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	3:32:12 PM	Tube furnace set to 0
8/10/2012	3:33:25 PM	Helium valve closed
8/10/2012	3:33:25 PM	BCl3 valve closed
8/10/2012	3:33:25 PM	PH3 valve closed
8/10/2012	3:33:25 PM	SiCl4 pre valve closed
8/10/2012	3:33:25 PM	SiCl4 post valve closed
8/10/2012	3:33:25 PM	Main Vac valve closed
8/10/2012	3:33:25 PM	Bypass valve closed
8/10/2012	3:33:25 PM	H2 valve opened
8/10/2012	3:33:25 PM	Bubbler valve opened
8/10/2012	3:33:25 PM	Helium MFC set to  0.000000
8/10/2012	3:33:25 PM	H2 MFC set to  500.000000
8/10/2012	3:33:25 PM	BCl3 MFC set to  0.000000
8/10/2012	3:33:25 PM	PH3 MFC set to  0.000000
8/10/2012	3:33:25 PM	SiCl4 MFC set to  0.000000
8/10/2012	3:33:25 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	3:33:26 PM	Tube furnace set to 0
8/10/2012	3:33:27 PM	Helium valve closed
8/10/2012	3:33:27 PM	BCl3 valve closed
8/10/2012	3:33:27 PM	PH3 valve closed
8/10/2012	3:33:27 PM	SiCl4 pre valve closed
8/10/2012	3:33:27 PM	SiCl4 post valve closed
8/10/2012	3:33:27 PM	Main Vac valve closed
8/10/2012	3:33:27 PM	Bypass valve closed
8/10/2012	3:33:27 PM	H2 valve opened
8/10/2012	3:33:27 PM	Bubbler valve opened
8/10/2012	3:33:27 PM	Helium MFC set to  0.000000
8/10/2012	3:33:27 PM	H2 MFC set to  500.000000
8/10/2012	3:33:27 PM	BCl3 MFC set to  0.000000
8/10/2012	3:33:27 PM	PH3 MFC set to  0.000000
8/10/2012	3:33:27 PM	SiCl4 MFC set to  0.000000
8/10/2012	3:33:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	3:33:27 PM	Tube furnace set to 1000
8/10/2012	3:58:27 PM	Helium valve closed
8/10/2012	3:58:27 PM	PH3 valve closed
8/10/2012	3:58:27 PM	Main Vac valve closed
8/10/2012	3:58:27 PM	Bypass valve closed
8/10/2012	3:58:27 PM	H2 valve opened
8/10/2012	3:58:27 PM	BCl3 valve opened
8/10/2012	3:58:27 PM	SiCl4 pre valve opened
8/10/2012	3:58:27 PM	SiCl4 post valve opened
8/10/2012	3:58:27 PM	Bubbler valve opened
8/10/2012	3:58:27 PM	Helium MFC set to  0.000000
8/10/2012	3:58:27 PM	H2 MFC set to  430.000000
8/10/2012	3:58:27 PM	BCl3 MFC set to  20.000000
8/10/2012	3:58:27 PM	PH3 MFC set to  0.000000
8/10/2012	3:58:27 PM	SiCl4 MFC set to  50.000000
8/10/2012	3:58:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	3:58:27 PM	Tube furnace set to 1000
8/10/2012	4:03:27 PM	Helium valve closed
8/10/2012	4:03:27 PM	PH3 valve closed
8/10/2012	4:03:27 PM	Main Vac valve closed
8/10/2012	4:03:27 PM	Bypass valve closed
8/10/2012	4:03:27 PM	H2 valve opened
8/10/2012	4:03:27 PM	BCl3 valve opened
8/10/2012	4:03:27 PM	SiCl4 pre valve opened
8/10/2012	4:03:27 PM	SiCl4 post valve opened
8/10/2012	4:03:27 PM	Bubbler valve opened
8/10/2012	4:03:27 PM	Helium MFC set to  0.000000
8/10/2012	4:03:27 PM	H2 MFC set to  450.000000
8/10/2012	4:03:27 PM	BCl3 MFC set to  1.000000
8/10/2012	4:03:27 PM	PH3 MFC set to  0.000000
8/10/2012	4:03:27 PM	SiCl4 MFC set to  50.000000
8/10/2012	4:03:27 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	4:03:27 PM	Tube furnace set to 1000
8/10/2012	4:31:57 PM	Helium valve closed
8/10/2012	4:31:57 PM	BCl3 valve closed
8/10/2012	4:31:57 PM	Main Vac valve closed
8/10/2012	4:31:57 PM	Bypass valve closed
8/10/2012	4:31:57 PM	H2 valve opened
8/10/2012	4:31:57 PM	PH3 valve opened
8/10/2012	4:31:57 PM	SiCl4 pre valve opened
8/10/2012	4:31:57 PM	SiCl4 post valve opened
8/10/2012	4:31:57 PM	Bubbler valve opened
8/10/2012	4:31:57 PM	Helium MFC set to  0.000000
8/10/2012	4:31:57 PM	H2 MFC set to  430.000000
8/10/2012	4:31:57 PM	BCl3 MFC set to  0.000000
8/10/2012	4:31:57 PM	PH3 MFC set to  20.000000
8/10/2012	4:31:57 PM	SiCl4 MFC set to  50.000000
8/10/2012	4:31:57 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	4:31:58 PM	Tube furnace set to 1000
8/10/2012	4:32:58 PM	Helium valve closed
8/10/2012	4:32:58 PM	BCl3 valve closed
8/10/2012	4:32:58 PM	Main Vac valve closed
8/10/2012	4:32:58 PM	Bypass valve closed
8/10/2012	4:32:58 PM	H2 valve opened
8/10/2012	4:32:58 PM	PH3 valve opened
8/10/2012	4:32:58 PM	SiCl4 pre valve opened
8/10/2012	4:32:58 PM	SiCl4 post valve opened
8/10/2012	4:32:58 PM	Bubbler valve opened
8/10/2012	4:32:58 PM	Helium MFC set to  0.000000
8/10/2012	4:32:58 PM	H2 MFC set to  445.000000
8/10/2012	4:32:58 PM	BCl3 MFC set to  0.000000
8/10/2012	4:32:58 PM	PH3 MFC set to  5.000000
8/10/2012	4:32:58 PM	SiCl4 MFC set to  50.000000
8/10/2012	4:32:58 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	4:32:58 PM	Tube furnace set to 1000
8/10/2012	4:33:28 PM	Helium valve closed
8/10/2012	4:33:28 PM	BCl3 valve closed
8/10/2012	4:33:28 PM	PH3 valve closed
8/10/2012	4:33:28 PM	SiCl4 pre valve closed
8/10/2012	4:33:28 PM	SiCl4 post valve closed
8/10/2012	4:33:28 PM	Main Vac valve closed
8/10/2012	4:33:28 PM	Bypass valve closed
8/10/2012	4:33:28 PM	H2 valve opened
8/10/2012	4:33:28 PM	Bubbler valve opened
8/10/2012	4:33:28 PM	Helium MFC set to  0.000000
8/10/2012	4:33:28 PM	H2 MFC set to  500.000000
8/10/2012	4:33:28 PM	BCl3 MFC set to  0.000000
8/10/2012	4:33:28 PM	PH3 MFC set to  0.000000
8/10/2012	4:33:28 PM	SiCl4 MFC set to  0.000000
8/10/2012	4:33:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	4:33:28 PM	Tube furnace set to 750
8/10/2012	4:48:28 PM	H2 valve closed
8/10/2012	4:48:28 PM	BCl3 valve closed
8/10/2012	4:48:28 PM	PH3 valve closed
8/10/2012	4:48:28 PM	SiCl4 pre valve closed
8/10/2012	4:48:28 PM	SiCl4 post valve closed
8/10/2012	4:48:28 PM	Main Vac valve closed
8/10/2012	4:48:28 PM	Bypass valve closed
8/10/2012	4:48:28 PM	Helium valve opened
8/10/2012	4:48:28 PM	Bubbler valve opened
8/10/2012	4:48:28 PM	Helium MFC set to  500.000000
8/10/2012	4:48:28 PM	H2 MFC set to  0.000000
8/10/2012	4:48:28 PM	BCl3 MFC set to  0.000000
8/10/2012	4:48:28 PM	PH3 MFC set to  0.000000
8/10/2012	4:48:28 PM	SiCl4 MFC set to  0.000000
8/10/2012	4:48:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	4:48:28 PM	Tube furnace set to 0
8/10/2012	5:08:28 PM	Helium valve closed
8/10/2012	5:08:28 PM	H2 valve closed
8/10/2012	5:08:28 PM	BCl3 valve closed
8/10/2012	5:08:28 PM	PH3 valve closed
8/10/2012	5:08:28 PM	SiCl4 pre valve closed
8/10/2012	5:08:28 PM	SiCl4 post valve closed
8/10/2012	5:08:28 PM	Main Vac valve closed
8/10/2012	5:08:28 PM	Bypass valve closed
8/10/2012	5:08:28 PM	Bubbler valve closed
8/10/2012	5:08:28 PM	Helium MFC set to  0.000000
8/10/2012	5:08:28 PM	H2 MFC set to  0.000000
8/10/2012	5:08:28 PM	BCl3 MFC set to  0.000000
8/10/2012	5:08:28 PM	PH3 MFC set to  0.000000
8/10/2012	5:08:28 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:08:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:08:28 PM	Tube furnace set to 0
8/10/2012	5:28:28 PM	Helium valve closed
8/10/2012	5:28:28 PM	H2 valve closed
8/10/2012	5:28:28 PM	BCl3 valve closed
8/10/2012	5:28:28 PM	PH3 valve closed
8/10/2012	5:28:28 PM	SiCl4 pre valve closed
8/10/2012	5:28:28 PM	SiCl4 post valve closed
8/10/2012	5:28:28 PM	Main Vac valve closed
8/10/2012	5:28:28 PM	Bubbler valve closed
8/10/2012	5:28:28 PM	Bypass valve opened
8/10/2012	5:28:28 PM	Helium MFC set to  0.000000
8/10/2012	5:28:28 PM	H2 MFC set to  0.000000
8/10/2012	5:28:28 PM	BCl3 MFC set to  0.000000
8/10/2012	5:28:28 PM	PH3 MFC set to  0.000000
8/10/2012	5:28:28 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:28:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:28:29 PM	Tube furnace set to 0
8/10/2012	5:29:28 PM	Helium valve closed
8/10/2012	5:29:28 PM	H2 valve closed
8/10/2012	5:29:28 PM	BCl3 valve closed
8/10/2012	5:29:28 PM	PH3 valve closed
8/10/2012	5:29:28 PM	SiCl4 pre valve closed
8/10/2012	5:29:28 PM	SiCl4 post valve closed
8/10/2012	5:29:28 PM	Main Vac valve closed
8/10/2012	5:29:28 PM	Bubbler valve closed
8/10/2012	5:29:28 PM	Bypass valve opened
8/10/2012	5:29:28 PM	Helium MFC set to  0.000000
8/10/2012	5:29:28 PM	H2 MFC set to  0.000000
8/10/2012	5:29:28 PM	BCl3 MFC set to  0.000000
8/10/2012	5:29:28 PM	PH3 MFC set to  0.000000
8/10/2012	5:29:28 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:29:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:29:28 PM	Tube furnace set to 0
8/10/2012	5:30:28 PM	Helium valve closed
8/10/2012	5:30:28 PM	H2 valve closed
8/10/2012	5:30:28 PM	BCl3 valve closed
8/10/2012	5:30:28 PM	PH3 valve closed
8/10/2012	5:30:28 PM	SiCl4 pre valve closed
8/10/2012	5:30:28 PM	SiCl4 post valve closed
8/10/2012	5:30:28 PM	Bypass valve closed
8/10/2012	5:30:28 PM	Bubbler valve closed
8/10/2012	5:30:28 PM	Main Vac valve opened
8/10/2012	5:30:28 PM	Helium MFC set to  0.000000
8/10/2012	5:30:28 PM	H2 MFC set to  0.000000
8/10/2012	5:30:28 PM	BCl3 MFC set to  0.000000
8/10/2012	5:30:28 PM	PH3 MFC set to  0.000000
8/10/2012	5:30:28 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:30:28 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:30:28 PM	Tube furnace set to 0
8/10/2012	5:35:15 PM	Run finished at 5:35 PM
8/10/2012	5:35:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2012	5:35:31 PM	Recipe started at 5:35 PM
8/10/2012	5:35:31 PM	Helium valve closed
8/10/2012	5:35:31 PM	H2 valve closed
8/10/2012	5:35:31 PM	BCl3 valve closed
8/10/2012	5:35:31 PM	PH3 valve closed
8/10/2012	5:35:31 PM	SiCl4 pre valve closed
8/10/2012	5:35:31 PM	SiCl4 post valve closed
8/10/2012	5:35:31 PM	Main Vac valve closed
8/10/2012	5:35:31 PM	Bypass valve closed
8/10/2012	5:35:31 PM	Bubbler valve closed
8/10/2012	5:35:31 PM	Helium MFC set to  0.000000
8/10/2012	5:35:31 PM	H2 MFC set to  0.000000
8/10/2012	5:35:31 PM	BCl3 MFC set to  0.000000
8/10/2012	5:35:31 PM	PH3 MFC set to  0.000000
8/10/2012	5:35:31 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:35:31 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:35:31 PM	Tube furnace set to 0
8/10/2012	5:35:34 PM	H2 valve closed
8/10/2012	5:35:34 PM	BCl3 valve closed
8/10/2012	5:35:34 PM	PH3 valve closed
8/10/2012	5:35:34 PM	SiCl4 pre valve closed
8/10/2012	5:35:34 PM	SiCl4 post valve closed
8/10/2012	5:35:34 PM	Main Vac valve closed
8/10/2012	5:35:34 PM	Bypass valve closed
8/10/2012	5:35:34 PM	Bubbler valve closed
8/10/2012	5:35:34 PM	Helium valve opened
8/10/2012	5:35:34 PM	Helium MFC set to  500.000000
8/10/2012	5:35:34 PM	H2 MFC set to  0.000000
8/10/2012	5:35:34 PM	BCl3 MFC set to  0.000000
8/10/2012	5:35:34 PM	PH3 MFC set to  0.000000
8/10/2012	5:35:34 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:35:34 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:35:34 PM	Tube furnace set to 0
8/10/2012	5:36:43 PM	Helium valve closed
8/10/2012	5:36:43 PM	H2 valve closed
8/10/2012	5:36:43 PM	BCl3 valve closed
8/10/2012	5:36:43 PM	PH3 valve closed
8/10/2012	5:36:43 PM	SiCl4 pre valve closed
8/10/2012	5:36:43 PM	SiCl4 post valve closed
8/10/2012	5:36:43 PM	Main Vac valve closed
8/10/2012	5:36:43 PM	Bypass valve closed
8/10/2012	5:36:43 PM	Bubbler valve closed
8/10/2012	5:36:43 PM	Helium MFC set to  0.000000
8/10/2012	5:36:43 PM	H2 MFC set to  0.000000
8/10/2012	5:36:43 PM	BCl3 MFC set to  0.000000
8/10/2012	5:36:43 PM	PH3 MFC set to  0.000000
8/10/2012	5:36:43 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:36:43 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:36:43 PM	Tube furnace set to 0
8/10/2012	5:36:44 PM	Run finished at 5:36 PM
8/10/2012	5:36:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/10/2012	5:38:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/10/2012	5:38:03 PM	Recipe started at 5:38 PM
8/10/2012	5:38:03 PM	Helium valve closed
8/10/2012	5:38:03 PM	H2 valve closed
8/10/2012	5:38:03 PM	BCl3 valve closed
8/10/2012	5:38:03 PM	PH3 valve closed
8/10/2012	5:38:03 PM	SiCl4 pre valve closed
8/10/2012	5:38:03 PM	SiCl4 post valve closed
8/10/2012	5:38:03 PM	Main Vac valve closed
8/10/2012	5:38:03 PM	Bubbler valve closed
8/10/2012	5:38:03 PM	Bypass valve opened
8/10/2012	5:38:03 PM	Helium MFC set to  0.000000
8/10/2012	5:38:03 PM	H2 MFC set to  0.000000
8/10/2012	5:38:03 PM	BCl3 MFC set to  0.000000
8/10/2012	5:38:03 PM	PH3 MFC set to  0.000000
8/10/2012	5:38:03 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:38:03 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:38:03 PM	Tube furnace set to 0
8/10/2012	5:39:22 PM	Helium valve closed
8/10/2012	5:39:22 PM	H2 valve closed
8/10/2012	5:39:22 PM	BCl3 valve closed
8/10/2012	5:39:22 PM	PH3 valve closed
8/10/2012	5:39:22 PM	SiCl4 pre valve closed
8/10/2012	5:39:22 PM	SiCl4 post valve closed
8/10/2012	5:39:22 PM	Main Vac valve closed
8/10/2012	5:39:22 PM	Bubbler valve closed
8/10/2012	5:39:22 PM	Bypass valve opened
8/10/2012	5:39:22 PM	Helium MFC set to  0.000000
8/10/2012	5:39:22 PM	H2 MFC set to  0.000000
8/10/2012	5:39:22 PM	BCl3 MFC set to  0.000000
8/10/2012	5:39:22 PM	PH3 MFC set to  0.000000
8/10/2012	5:39:22 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:39:22 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:39:23 PM	Tube furnace set to 0
8/10/2012	5:40:23 PM	Helium valve closed
8/10/2012	5:40:23 PM	H2 valve closed
8/10/2012	5:40:23 PM	BCl3 valve closed
8/10/2012	5:40:23 PM	PH3 valve closed
8/10/2012	5:40:23 PM	SiCl4 pre valve closed
8/10/2012	5:40:23 PM	SiCl4 post valve closed
8/10/2012	5:40:23 PM	Bypass valve closed
8/10/2012	5:40:23 PM	Bubbler valve closed
8/10/2012	5:40:23 PM	Main Vac valve opened
8/10/2012	5:40:23 PM	Helium MFC set to  0.000000
8/10/2012	5:40:23 PM	H2 MFC set to  0.000000
8/10/2012	5:40:23 PM	BCl3 MFC set to  0.000000
8/10/2012	5:40:23 PM	PH3 MFC set to  0.000000
8/10/2012	5:40:23 PM	SiCl4 MFC set to  0.000000
8/10/2012	5:40:23 PM	Bypass solenoid MFC set to  0.000000
8/10/2012	5:40:23 PM	Tube furnace set to 0
8/10/2012	5:40:24 PM	Run finished at 5:40 PM
8/10/2012	5:40:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
